In the field of semiconductor-related production equipment, we manufacture and market the Load Port which transfers silicon wafers to individual processing equipment, wafer transfer robots(Atmospheric type and vacuum type), and EFEM which integrate the Load Port and wafer transfer robots. We also provide load ports, transfer robots and related integrated EFEM for FOPLP.

Hirata Equipment Front End Module is located in front of the process equipment that processes wafers and panels. The Equipment Front End Module passes wafers and panels between the pods and the process equipment and the sorter transfers wafers and panels in a clean environment.

Wafer transfer robots that can be used in low-vacuum environments and high-vacuum environments.